Condensed Matter Physics, 2013, vol. 16, No. 3, p. 33803:1-8
DOI:10.5488/CMP.16.33803           arXiv:1310.1235

Title: Numerical analysis of the morphological and phase changes in the TiN/Al2O3 coating under high current electron beam modification
Author(s):
  A.D. Pogrebnjak (Sumy State University, 2 Rimskii-Korsakov St., 40007 Sumy, Ukraine) ,
  V.N. Borisyuk (Sumy State University, 2 Rimskii-Korsakov St., 40007 Sumy, Ukraine) ,
  A.A. Bagdasaryan (Sumy State University, 2 Rimskii-Korsakov St., 40007 Sumy, Ukraine)

The modification of the surface structure of the hybrid coating TiN/Al2O3 with a low-energy high-current electron beam (NCEB) is performed. The surface roughness is considered as a function of beam current. Surfaces of the obtained samples are investigated within the two-dimensional multifractal detrended fluctuation analysis (MF-DFA). The multifractal spectrum of the surface is calculated as a quantitative parameter of the roughness. It is shown that with the increase of the beam energy, the surface become more regular and uniform.

Key words: self-similarity, fractal dimension, hybrid coating, high-current electron beam(s) effect
PACS: 81.40.- z, 81.07.- b, 68.35.-p, 61.46.-w, 05.45.Df, 61.43.Hv


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